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The practical studies on the method of particle contamination control for yield enhancement in the cleanroom were carried out. The method of the contamination control was proposed, which are composed of data collection, data analysis, improvement action, verification, and implement control. In order to test the accuracy of these correlations, we compared air flow patterns before regulating the opening ratio of access floor with those after regulating. Results after regulating the opening ratio of access floor show good unidirectional uniform airflow pattern. From these results, it is concluded that the partition check and the composition analysis are effective solutions for particle contamination control in the cleanroom production lines.