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Suppressing residual vibrations of flexible materials cheaply is an important issue to increase productivity of automated factory using wafer or glass handling robots. In this paper, we present Linux/RTAI-based implementation of input shaping control for reducing residual vibrations of a mechanical system. Experimental results show that residual vibrations of the mechanical system are reduced up to 82% at a point-to-point linear motion.


Suppressing residual vibrations of flexible materials cheaply is an important issue to increase productivity of automated factory using wafer or glass handling robots. In this paper, we present Linux/RTAI-based implementation of input shaping control for reducing residual vibrations of a mechanical system. Experimental results show that residual vibrations of the mechanical system are reduced up to 82% at a point-to-point linear motion.