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This paper is to find effective SPC operation in semiconductor companies. we proposed SPC system framework and suitable control chart based on process date characteristics in semiconductor manufacturing process. Monitoring of process input parameters is more important than monitoring of process output parameters in semiconductor SPC system. Also, suitable control charts of thickness of GOX process considered variation factors, and particle control charts reflected its data characteristics. This study also shows feasibility of suitable control charts through a case study of semiconductor companies.


This paper is to find effective SPC operation in semiconductor companies. we proposed SPC system framework and suitable control chart based on process date characteristics in semiconductor manufacturing process. Monitoring of process input parameters is more important than monitoring of process output parameters in semiconductor SPC system. Also, suitable control charts of thickness of GOX process considered variation factors, and particle control charts reflected its data characteristics. This study also shows feasibility of suitable control charts through a case study of semiconductor companies.