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Main photo processes are related with track equipment and stepper of in-line type in the display manufacturing. Productivity is decreasing due to unplanned tasks of photo process equipment. Photo equipment is recording the operating situations using computer systems. Based on the record, equipment operation time was divided into real operating time and downtime of the equipment. The downtime was also classified by the characteristics of the down time. The causes and counter measures for the down time were proposed. This paper may contribute on the improvement of productivity of the photo processes.


Main photo processes are related with track equipment and stepper of in-line type in the display manufacturing. Productivity is decreasing due to unplanned tasks of photo process equipment. Photo equipment is recording the operating situations using computer systems. Based on the record, equipment operation time was divided into real operating time and downtime of the equipment. The downtime was also classified by the characteristics of the down time. The causes and counter measures for the down time were proposed. This paper may contribute on the improvement of productivity of the photo processes.