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monodisperse spherical silica particles, 200~300 nm in diameter, were produced via a dry route forthe first time through a two-stage hydrolysis of SiCl4 vapor. In the first stage, the SiCl4 was partially hydrolyzed in abatch reactor at 150oC to form nearly monodisperse silicon oxychloride particles. In the second stage, the oxychlorideswere hydrolyzed further in a tubular reactor to have produced silica with the morphology and size nearly conserved.