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The effect of Eu contents on the ferroelectric properties of Bi4-xEuxTi3O12 (BET) thin films has been investigated. Bismuth Europium titanate thin films with a Eu contents were prepared on the Pt/Ti/SiO2/Si substrate by metal-organic decomposition technique. The structure and the morphology of the films were analyzed using X-ray diffraction (XRD) and field emission scanning microscopy (FE-SEM), respectively. From the XRD analysis, it was found that BET thin films have polycrystalline structure, and the layered-perovskite phase is obtained when the Eu contents exceeds 0.2 (x > 0.2). Also, the ferroelectric characteristics of the BET thin films were found to be dependent on the Eu content. Particularly, the BET films doped with x = 0.75 show better ferroelectric properties (remanent polarization 2Pr = 60.99 C/cm2 and only a little polarization fatigue up to 3.5×109 bipolar switching cycling) than those doped with other Eu contents.