초록 close

열화학 기상합성법을 이용하여 수직배향된 MWNT를 합성하였다. 우리는 탄소나노튜브 (CNT : carbon nanotube)의 벽수조절을 위하여 Fe촉매를 나노사이즈로 조절하였다. Fe 나노 촉매의 사이즈와 분포는 합성 온도, 열 노출 시간과 촉매 금속의 두께에 따라 다양하게 존재하고 이것은 합성된 CNT의 벽수를 바꾸어 준다. 열 노출 시간이 10 sec에서 0 sec로 줄어들수록 CNT의 평균 벽수는 줄어든다. AFM (atomic force microscope), SEM (scanning electron microscope), TEM (transmission electron microscope) 측정에 의한 결과는 기판 위 CNT 합성과정에서 금속촉매 입자의 표면분포의 결정적인 증거가 된다. CNT합성은 열화학기상합성 장치 내에서 800 $^\circ$C로 10분 동안 이루어 졌다. 우리는 벽수가 적은 CNT들을 합성하는데 성공했다. 합성 되어진 CNT를 X-선 총으로 사용하기 위하여 지름이 5 mm인 스테인레스 기판 위에 합성하였다.


Large arrays of self-oriented, multi-wall carbon nanotubes (MWNTs) have been obtained using chemical vapor deposition. We controlled the size of the catalytic Fe nanoparticles to control the wall number of the carbon nanotubes (CNTs). The sizes and the special distribution of the Fe nanoparticles varied with the growth temperature, the heat exposure time, and the thickness of the catalytic metal layer, resulting in a change in the wall number of the grown CNTs. With decreasing in heat exposure time from 10 to 0 sec, the average wall number of the CNTs decreased. A combination of atomic force microscop (AFM), scanning electron microscop (SEM), and transmission electron microscop (TEM) provided evidence for the crucial role of the surface distribution of the metallic catalyst particles on the substrate during the growth of the CNT. The CNT growth was performed at 800 ${^\circ}$C for 10 min by using thermal chemical vapor deposition (T-CVD). We succeeded in growing vertically aligned small-wall CNTs. For use with the X-ray gun, the CNTs were synthesized on a 5 mm-diameter sus plate.


Large arrays of self-oriented, multi-wall carbon nanotubes (MWNTs) have been obtained using chemical vapor deposition. We controlled the size of the catalytic Fe nanoparticles to control the wall number of the carbon nanotubes (CNTs). The sizes and the special distribution of the Fe nanoparticles varied with the growth temperature, the heat exposure time, and the thickness of the catalytic metal layer, resulting in a change in the wall number of the grown CNTs. With decreasing in heat exposure time from 10 to 0 sec, the average wall number of the CNTs decreased. A combination of atomic force microscop (AFM), scanning electron microscop (SEM), and transmission electron microscop (TEM) provided evidence for the crucial role of the surface distribution of the metallic catalyst particles on the substrate during the growth of the CNT. The CNT growth was performed at 800 ${^\circ}$C for 10 min by using thermal chemical vapor deposition (T-CVD). We succeeded in growing vertically aligned small-wall CNTs. For use with the X-ray gun, the CNTs were synthesized on a 5 mm-diameter sus plate.