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본 연구에서는 하지층으로 Mo을 사용한 스핀밸브구조에서 반강자성체 IrMn의 두께 변화에 따른 자기적 특성을 연구하였다. 사용된 스핀밸브는 Si기판/SiO2/Mo(17 Å)/NiFe(21 Å)/CoFe(28 Å)/Cu(22 Å)/CoFe(18 Å)/IrMn(t Å)/Ta(25 Å) 구조이다. Mo 박막의 비저항은 600 oC에서 650 oC 열처리 후 급격히 증가하였다. 반강자성체인 IrMn의 두께 변화(130 Å까지)에 따른 자기저항비와 교환결합력을 측정하였다. IrMn의 두께가 65 Å 일때 자기저항비와 교환결합력은 9.65 %와 337.5 Oe로 최고값을 나타냈다. 그러나 두께를 더욱 증가시킨 97.5 Å 일때 자기저항비와 교환결합력은 8.2 %와 285 Oe로 감소하였으며, IrMn의 두께가 130 Å 일때 자기저항비와 교환결합력은 더욱 감소한 7.65 %와 257.5 Oe이었다.


In this research, magnetic properties of spin valve structures using IrMn layers as antiferromagnetic were studied depending on the thickness of the pinned layer. The spin valve structure was Si substrate/SiO2(2,000 ?/Mo(17 ?/NiFe(21 ?/CoFe(28 ?/Cu(22 ?/CoFe(18 ?/IrMn(t ?/Ta(25 ?. Also, Mo film was deposited on Si substrates and the thermal annealing effect was analyzed. The resistivity of the Mo film was increased as an annealing temperature was increased up to 600 oC. The variations of MR ratio were related with magnetic exchange coupling field of the spin valve structures for various IrMn pinned layer thickness up to 130 ? MR ratio and Hex of spin valves was about 9.05 % and 277.5 Oe when the thickness of the IrMn pinned layer was 32.5 ?(t = 32.5 ?. It was increased to 9.65 % and 337.5 Oe for t = 65 ? For t = 97.5 ? the MR ratio and Hex decreased to 8.2 % and 285 Oe, and further decrease was observed up to t = 130 ?