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Thin nanodotstructured metal lms and heterostructured nanodot arrays (metal nanodot arrays/Si) with a high density and uniformdistribution for various kinds of metals (Au, Al, Ag, Pb, Cu, Sn, and Zn) were fabricated by thermal vacuum evaporation using an ano-dic porous alumina membrane as a template. However, for such metals as Sn, Zn, and Pb with relatively lower melting point as comparedoped a new method termed ‘‘two step evaporation method’’. The size and the arrays of dots were depended on the pore structure in theanodic porous alumina template. The technique demonstrated in this report is simple and suitable for the preparation of nanodot arraysin the large area for materials which could be vacuum evaporated.