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In the dielectric (Ba,Sr)TiO3 thin lms, the correlation between the lm thickness and the dielectric properties was investigated. Thedielectric properties such as the dielectric constant (e) and dielectric loss (tand) were measured using the capacitor geometry. As the lmloss did not show a monotonous variation with the increasing lm thickness. It was found that the dielectric loss correlated well with thenon-uniform distribution of local strain, as analyzed by X-ray diraction, according to the Curievon Schweidler relaxation law.