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A radio-frequency quadruple (RFQ) linear accelerator has been proposed as an effective choice for high-energy ion implantation. The RFQ system was designed to accelerate ions, such as O2+, up to 1 MeV with a maximum current of 2 mA, possibly in CW mode. With the provision of a few-hundred-kV high-voltage platform in the system, the beam energy and the ion species can be varied in a range to meet the requirements of ion implantation. We used PARMTEQ to optimize the parameters of the RFQ by taking into account the beam optics, and we used a finite integration code to study the cavity structure.?


A radio-frequency quadruple (RFQ) linear accelerator has been proposed as an effective choice for high-energy ion implantation. The RFQ system was designed to accelerate ions, such as O2+, up to 1 MeV with a maximum current of 2 mA, possibly in CW mode. With the provision of a few-hundred-kV high-voltage platform in the system, the beam energy and the ion species can be varied in a range to meet the requirements of ion implantation. We used PARMTEQ to optimize the parameters of the RFQ by taking into account the beam optics, and we used a finite integration code to study the cavity structure.?