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- In this paper, a three-dimensional finite element method and construction of equivalent-circuit for a linear ultrasonic motor are presented. The validity of three-dimensional finite element routine in this paper is experimentally confirmed by analyzing impedance of a piezoelectric transducer. Using this confirmed finite element routine, impedance and vibration mode of a linear ultrasonic motor are calculated. Elliptical motion of contact point between vibrator and rail of the linear ultrasonic motor is shown for determination of contact points. By using the finite element method and analytic equations, characteristics of the linear ultrasonic motor, such as thrust force, speed, losses, powers and efficiency, are calculated. The results are confirmed by experiment. Finally, equivalent circuit parameters of the linear ultrasonic motor are obtained using the three-dimensional finite element method and analytic equations.


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equivalent circuit, finite element method, linear motor, piezoelectric, ultrasonic motor1. IntroductionUltrasonic motors have received much attention in response to the need for high-torque density, low-speed at high efficiency and small weight for