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- Currently organic TFTs are under development to be applied to the large-area flexible display and low-cost applications. In this paper, the improvement of pentacene OTFT's performance, resulted from inserting the self-assembly layer such as HMDS and OTS between the pentacene film and the gate dielectric layer, is investigated. The model of the interface treatment effects is also proposed. The field effect mobility of OTFTs treated with OTS has been dramatically improved to 0.3㎠/Vsec, and the off-state current reduced to 10 pA, resulting in increasing the on/off current ratio to 106. The performance approaches to that of α-Si TFT.