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ITO-Al-ITO multi-layers were deposited at room temperature by RF magnetron sputtering on polyethylene terephthalate (PET). The films were deposited at various pressures of 8×10-4, 1×10-3, 4×10-3, 8×10-3 and 1×10-2Torr. A correlation between microstructure and electro-optical properties was studied. Films deposited  at low pressure have higher transmission, and lower reflectance and resistance than film deposited at high pressure. Sheet resistance, transmission, and reflectance were 141.6Ω/□ 88% and 6.8% resectively when the deposition pressure was 8×10-4torr, that was the optimum condition.