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- This paper presents a process optimization of antireflection (AR) coating on crystalline Si solar cells. Theoretical and experimental investigations were performed on a double-layer AR (DLAR) coating of MgF2/CeO2. We investigated CeO2 films as an AR layer because they have a proper refractive index of 2.46 and demonstrate the same lattice constant as Si substrate. RF sputter grown CeO2 film showed strong dependence on a deposition temperature. The CeO2 deposited at 400℃ exhibited a strong (111) preferred orientation and the lowest surface roughness of 6.87Å. Refractive index of MgF2 film was measured as 1.386 for the most of growth temperature. An optimized DLAR coating showed a reflectance as low as 2.04% in the wavelengths ranged from 0.4㎛ to 1.1㎛. We achieved the efficiencies of solar cells greater than 15% with 3.12% improvement with DLAR coatings. Further details on MgF2, CeO2 films, and cell fabrication parameters are presented in this paper.