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A feature-based inspection planning system is proposed in this research to develop more efficient measuring methodology for the OMM(On-Machine Measurement) or CMM(Coordinate Measuring Machine) for complicated workpiece having many primitive form features. This paper is proposed solution that optimum inspection sequence of the objective features. The sequences are determined by analyzing the feature information such as the nearest relationship and the possible probe-approach direction(PAD) of the features, and forming feature groups. A series of heuristic rules are developed to accomplish it. Also, each feature is decomposed into its constituent geometric elements for inspection process, and then the number of sampling points, location of the measuring points, optimum probing path are determined.