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초전형 적외선 센서를 제작하기 위하여 rf 마그네트론 스퍼터링법으로 (Pb,La)TiO3(PLT)/LiTaO3(LTO)/PLT 강유전 박막을 증착한 후 급속 열처리하여 열처리 온도와 시간에 따른 결정성을 조사하였다. 강유전 박막의 c축 배향도에 따른 비유전율 및 유전손실을 측정하고 c축 배향도가 가장 큰 강유전 박막으로 제작된 센서에 대해 초전계수를 측정하여 센서의 전압응답에 대한 성능지수(F_V


For fabrication of the pyroelectric IR sensor (Pb,La)TiO3(PLT)/LiTaO3(LTO)/PLT ferroelectric thin films was deposited by rf magnetron sputtering followed by rapid thermal annealing and the crystallinity as a function of annealing temperature and time was investigated. Permittivity and dielectric loss factor of ferroelectric thin films as a function of c-axis preffered orientation was measured. Also pyroelectric coefficient of ferroelectric thin films with largest c-axis preffered orientation was measured and obtain figure of merit of voltage response(F_V